The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2012
Filed:
Sep. 08, 2009
Akira Hamamatsu, Yokohama, JP;
Minori Noguchi, Mitsukaido, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Yoshimasa Ohshima, Yokohama, JP;
Takahiro Jingu, Takasaki, JP;
Sachio Uto, Yokohama, JP;
Akira Hamamatsu, Yokohama, JP;
Minori Noguchi, Mitsukaido, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Yoshimasa Ohshima, Yokohama, JP;
Takahiro Jingu, Takasaki, JP;
Sachio Uto, Yokohama, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
The present invention provides an inspection apparatus and inspection method. The inspection apparatus includes a stage mechanism for supporting an object under inspection. A spatial filter is provided in the detection optical system to inspect the object. A printer is used to print the results of the spatial filter. The spatial filter can be provided in the form of a Fourier transformed image.