The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2011
Filed:
Nov. 11, 2010
Albert J Crespin, San Jose, CA (US);
Jim Woodruff, San Jose, CA (US);
Ray Ellis, Fremont, CA (US);
Scott Kulas, Fremont, CA (US);
Joe Jamello, Saratoga, CA (US);
Emily True, Pleasanton, CA (US);
Albert J Crespin, San Jose, CA (US);
Jim Woodruff, San Jose, CA (US);
Ray Ellis, Fremont, CA (US);
Scott Kulas, Fremont, CA (US);
Joe Jamello, Saratoga, CA (US);
Emily True, Pleasanton, CA (US);
Ultratech, Inc., San Jose, CA (US);
Abstract
An apparatus for measuring the relative positions of frontside and backside alignment marks located on opposite sides of a substrate is disclosed. The apparatus includes upper and lower optical systems that allow for simultaneous imaging of frontside and backside alignment marks. The frontside and backside alignment mark images are processed to determine the relative position of the marks, as a measurement of the alignment and/or overlay performance of the tool that formed the marks on the substrate.