The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2011
Filed:
Nov. 22, 2005
Brian J. Greene, Danbury, CT (US);
Chung Woh Lai, Singapore, SG;
Yong Meng Lee, Singapore, SG;
Wenhe Lin, Singapore, SG;
Siddhartha Panda, Beacon, NY (US);
Kern Rim, Yorktown Heights, NY (US);
Young Way Teh, Singapore, SG;
Brian J. Greene, Danbury, CT (US);
Chung Woh Lai, Singapore, SG;
Yong Meng Lee, Singapore, SG;
Wenhe Lin, Singapore, SG;
Siddhartha Panda, Beacon, NY (US);
Kern Rim, Yorktown Heights, NY (US);
Young Way Teh, Singapore, SG;
International Business Machines Corporation, Armonk, NY (US);
Chartered Semiconductor Manufacturing Ltd., Singapore, SG;
Abstract
A method (and apparatus) of post silicide spacer removal includes preventing damage to the silicide spacer through the use of at least one of an oxide layer and a nitride layer.