The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2011
Filed:
Dec. 11, 2009
Roy C. Nangoy, Santa Clara, CA (US);
Shou-sung Chang, Stanford, CA (US);
Donald J. K. Olgado, Palo Alto, CA (US);
Hung Chih Chen, Sunnyvale, CA (US);
Gerald John Alonzo, Los Gatos, CA (US);
Roy C. Nangoy, Santa Clara, CA (US);
Shou-Sung Chang, Stanford, CA (US);
Donald J. K. Olgado, Palo Alto, CA (US);
Hung Chih Chen, Sunnyvale, CA (US);
Gerald John Alonzo, Los Gatos, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Apparatus and methods for conditioning a polishing pad include an arm adapted to support a conditioning disk; a drive mechanism coupled to the arm; and a flexible coupling between the drive mechanism and the conditioning disk adapted to allow the conditioning disk to tilt while transmitting rotary motion from the drive mechanism to the conditioning disk. Numerous other aspects are disclosed.