The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2010
Filed:
Jan. 26, 2007
Andrew D. Bailey, Iii, Pleasanton, CA (US);
Alan M. Schoepp, Ben Lomond, CA (US);
Gregory Sexton, Fremont, CA (US);
Andras Kuthi, Thousand Oaks, CA (US);
Yunsang Kim, Monte Sereno, CA (US);
William S. Kennedy, Fremont, CA (US);
Andrew D. Bailey, III, Pleasanton, CA (US);
Alan M. Schoepp, Ben Lomond, CA (US);
Gregory Sexton, Fremont, CA (US);
Andras Kuthi, Thousand Oaks, CA (US);
Yunsang Kim, Monte Sereno, CA (US);
William S. Kennedy, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A device for cleaning a bevel edge of a semiconductor substrate. The device includes a lower electrode assembly that has a top surface and is adapted to support the substrate and an upper electrode assembly that has a bottom surface opposing the top surface. The lower and upper electrode assemblies generate plasma for cleaning the bevel edge of the substrate disposed between the top and bottom surfaces during operation. The device also includes a mechanism for suspending the upper electrode assembly over the lower support and adjusting the tilt angle and horizontal translation of the bottom surface relative to the top surface.