The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2010
Filed:
Dec. 16, 2004
Yoshichika Tokuno, Tosu, JP;
Norihiro Ito, Tosu, JP;
Takehiko Orii, Nirasaki, JP;
Mitsunori Nakamori, Nirasaki, JP;
Tadashi Iino, Nirasaki, JP;
Hiroki Ohno, Minato-Ku, JP;
Yusuke Saito, Nirasaki, JP;
Yoshichika Tokuno, Tosu, JP;
Norihiro Ito, Tosu, JP;
Takehiko Orii, Nirasaki, JP;
Mitsunori Nakamori, Nirasaki, JP;
Tadashi Iino, Nirasaki, JP;
Hiroki Ohno, Minato-Ku, JP;
Yusuke Saito, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Water vapor is mixed to Ogas generated by an ozone generator of discharge type. The mixed fluid is cooled by a cooler, thereby impurities such as metals and nitrogen oxides contained in the Ogas dissolve into condensed water. Subsequently, a gas-liquid separator separates the Ogas from the condensed water. Water vapor is mixed with the Ogas again. The mixed fluid passes through a metal trap composed of a container containing plural silicon chips as a metal adsorbent, thereby to remove the remaining metals therefrom.