Location History:
- Tosu, JP (2010)
- Fukuoka-Ken, JP (2012)
Company Filing History:
Years Active: 2010-2012
Title: The Innovations of Yoshichika Tokuno
Introduction
Yoshichika Tokuno is a notable inventor based in Fukuoka-ken, Japan. He has made significant contributions to the field of substrate processing and ozone processing technologies. With a total of two patents to his name, Tokuno's work focuses on improving efficiency and reducing costs in substrate processing methods.
Latest Patents
Tokuno's latest patents include a substrate processing method and an ozone processing apparatus. The substrate processing method aims to prevent the generation of watermarks on substrates while being cost-effective. This method involves controlling the ambient humidity around the substrate based on the type of chemical liquid used during processing. Specifically, humidity control is crucial during the drying step, especially when using a fluid containing isopropyl alcohol (IPA) as a drying agent.
The ozone processing apparatus patent describes a method where water vapor is mixed with ozone gas generated by a discharge-type ozone generator. This mixed fluid is then cooled, allowing impurities such as metals and nitrogen oxides to dissolve into condensed water. A gas-liquid separator is employed to separate the ozone gas from the condensed water, and the mixed fluid is passed through a metal trap containing silicon chips to remove any remaining metals.
Career Highlights
Yoshichika Tokuno is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at Tokyo Electron has allowed him to develop innovative solutions that enhance substrate processing techniques.
Collaborations
Throughout his career, Tokuno has collaborated with esteemed colleagues such as Hiroshi Nagayasu and Norihiro Ito. These collaborations have contributed to the advancement of technologies in their respective fields.
Conclusion
Yoshichika Tokuno's contributions to substrate processing and ozone processing technologies highlight his innovative spirit and dedication to improving manufacturing processes. His patents reflect a commitment to efficiency and cost-effectiveness in the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.