The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2010
Filed:
Jun. 25, 2007
Mamoru Nakasuji, Kanagawa, JP;
Tohru Satake, Kanagawa, JP;
Kenji Watanabe, Kanagawa-ken, JP;
Takeshi Murakami, Tokyo, JP;
Nobuharu Noji, Kanagawa, JP;
Hirosi Sobukawa, Kanagawa, JP;
Tsutomu Karimata, Kanagawa, JP;
Shoji Yoshikawa, Tokyo, JP;
Toshifumi Kimba, Kanagawa, JP;
Shin Oowada, Kanagawa, JP;
Mitsumi Saito, Kanagawa, JP;
Muneki Hamashima, Saitama, JP;
Toru Takagi, Kanagawa, JP;
Naoto Kihara, Kanagawa, JP;
Hiroshi Nishimura, Kanagawa, JP;
Mamoru Nakasuji, Kanagawa, JP;
Tohru Satake, Kanagawa, JP;
Kenji Watanabe, Kanagawa-ken, JP;
Takeshi Murakami, Tokyo, JP;
Nobuharu Noji, Kanagawa, JP;
Hirosi Sobukawa, Kanagawa, JP;
Tsutomu Karimata, Kanagawa, JP;
Shoji Yoshikawa, Tokyo, JP;
Toshifumi Kimba, Kanagawa, JP;
Shin Oowada, Kanagawa, JP;
Mitsumi Saito, Kanagawa, JP;
Muneki Hamashima, Saitama, JP;
Toru Takagi, Kanagawa, JP;
Naoto Kihara, Kanagawa, JP;
Hiroshi Nishimura, Kanagawa, JP;
Ebara Corporation, Tokyo, JP;
Abstract
The present invention provides an electron beam apparatus for evaluating a sample surface, which has a primary electro-optical system for irradiating a sample with a primary electron beam, a detecting system, and a secondary electro-optical system for directing secondary electron beams emitted from the sample surface by the irradiation of the primary electron beam to the detecting system.