The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2010
Filed:
Jun. 29, 2006
Li-jui Chen, Hsin-Chu, TW;
Tzung-chi Fu, Maioli, TW;
Ching-yu Chang, Yilang County, TW;
Fu-jye Liang, Kaohsiung, TW;
Lin-hung Shiu, Hsinchu, TW;
Chun-kuang Chen, Hsin-Chu, TW;
Tsai-sheng Gau, Hsinchu, TW;
Li-Jui Chen, Hsin-Chu, TW;
Tzung-Chi Fu, Maioli, TW;
Ching-Yu Chang, Yilang County, TW;
Fu-Jye Liang, Kaohsiung, TW;
Lin-Hung Shiu, Hsinchu, TW;
Chun-Kuang Chen, Hsin-Chu, TW;
Tsai-Sheng Gau, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
A lithography apparatus includes an imaging lens module; a substrate table positioned underlying the imaging lens module and configured to hold a substrate; a fluid retaining module configured to hold a fluid in a space between the imaging lens module and a substrate on the substrate stage; and a heating element configured in the fluid retaining module and adjacent to the space. The heating element includes at least two of following: a sealant insoluble to the fluid for sealing the heating element in the fluid retaining module; a sealed opening configured in one of top portion and side portion of the fluid retaining module for sealing the heating element in the fluid retaining module; and/or a non-uniform temperature compensation device configured with the heating element.