The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2009
Filed:
Nov. 08, 2004
Hans-jürgen Mann, Oberkochen, DE;
Udo Dinger, Oberkochen, DE;
Wilhelm Ulrich, Aalen, DE;
Wolfgang Reinecke, Zeuthen, DE;
Thomas Engel, Erfurt, DE;
Axel Zibold, Jena, DE;
Wolfgang Harnisch, Lehesten, DE;
Marco Wedowski, Oberkochen, DE;
Dieter Pauschinger, Berlin, DE;
Hans-Jürgen Mann, Oberkochen, DE;
Udo Dinger, Oberkochen, DE;
Wilhelm Ulrich, Aalen, DE;
Wolfgang Reinecke, Zeuthen, DE;
Thomas Engel, Erfurt, DE;
Axel Zibold, Jena, DE;
Wolfgang Harnisch, Lehesten, DE;
Marco Wedowski, Oberkochen, DE;
Dieter Pauschinger, Berlin, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
There is provided a reflective X-ray microscope for examining an object in an object plane. The reflective X-ray microscope includes (a) a first subsystem, having a first mirror and a second mirror, disposed in a beam path from the object plane to the image plane, and (b) a second subsystem, having a third mirror, situated downstream of the first subsystem in the beam path. The object is illuminated with radiation having a wavelength <100 nm, and the reflective X-ray microscope projects the object with magnification into an image plane.