The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2009
Filed:
Oct. 31, 2007
Akira Hamamatsu, Yokohama, JP;
Minori Noguchi, Mitsukaido, JP;
Yoshimasa Ooshima, Yokohama, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Tetsuya Watanabe, Honjyou, JP;
Akira Hamamatsu, Yokohama, JP;
Minori Noguchi, Mitsukaido, JP;
Yoshimasa Ooshima, Yokohama, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Tetsuya Watanabe, Honjyou, JP;
Abstract
A defect-inspecting apparatus including an arrangement to convert detected light into a first signal corresponding to light illuminated by a high-angle illumination optical system and/or a second signal corresponding to light illuminated by a low-angle illumination optical system; and a classification unit which utilizes the first and second signal and classifies defects on the object to be inspected, wherein a defect size is estimated by changing a correction coefficient of the defect size on a basis of a concave-convex level (b/a), where the concave-convex level (b/a) of a defect is indicated by a ratio of a size b of a first direction of the defect to a size a of a second direction of the defect, where the second direction is lateral to the first direction.