The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2008
Filed:
Aug. 22, 2005
Measurement method of electron beam current, electron beam writing system and electron beam detector
Makoto Sakakibara, Kokubunji, JP;
Yoshinori Nakayama, Sayama, JP;
Hiroya Ohta, Kodaira, JP;
Yasunari Sohda, Kawasaki, JP;
Noriyuki Tanaka, Hitachinaka, JP;
Yasuhiro Someda, Tochigi, JP;
Makoto Sakakibara, Kokubunji, JP;
Yoshinori Nakayama, Sayama, JP;
Hiroya Ohta, Kodaira, JP;
Yasunari Sohda, Kawasaki, JP;
Noriyuki Tanaka, Hitachinaka, JP;
Yasuhiro Someda, Tochigi, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A technology capable of reducing the influence of the noise overlapped in a long transmission line when accurately measuring weak beam current in an electron beam writing system and capable of accurately and efficiently measuring weak beam current in a beam writing system using multiple beams is provided. With using a switch for connecting and disconnecting an electron beam detecting device and a detected signal line, the electron beam detecting device is disconnected from the detected signal line to accumulate the detected signals in the electron beam detecting device during the beam current measurement. Simultaneously with the finish of the measurement, the electron beam detecting device and the detected signal line are connected to measure the accumulated signals. Also, in order to simultaneously perform the measurement method, a plurality of electron beam detecting devices and switches are used to simultaneously measure a plurality of electron beams with high accuracy.