The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2008
Filed:
Jun. 15, 2006
Hiroyuki Shinada, Chofu, JP;
Atsuko Takafuji, Tokyo, JP;
Takanori Ninomiya, Hiratsuka, JP;
Yuko Sasaki, Hitachinaka, JP;
Mari Nozoe, Hino, JP;
Hisaya Murakoshi, Tokyo, JP;
Taku Ninomiya, Hitachinaka, JP;
Yuji Kasai, Hitachinaka, JP;
Hiroshi Makino, Kokubunji, JP;
Yutaka Kaneko, Mitaka, JP;
Kenji Tanimoto, Hitachinaka, JP;
Hiroyuki Shinada, Chofu, JP;
Atsuko Takafuji, Tokyo, JP;
Takanori Ninomiya, Hiratsuka, JP;
Yuko Sasaki, Hitachinaka, JP;
Mari Nozoe, Hino, JP;
Hisaya Murakoshi, Tokyo, JP;
Taku Ninomiya, Hitachinaka, JP;
Yuji Kasai, Hitachinaka, JP;
Hiroshi Makino, Kokubunji, JP;
Yutaka Kaneko, Mitaka, JP;
Kenji Tanimoto, Hitachinaka, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
An apparatus for inspecting a sample using a scanning electron microscope includes a sample stage, a first electron-optical system to scan an electron beam of a first beam current on the sample, a second electron-optical system to scan an electron beam of a second beam current smaller than the first beam current on the sample, a mechanism to move the sample stage, a detector provided in each of the first and second electron-optical systems to detect a secondary electron. The first electron-optical system is operable in a first mode and the second electron-optical system is operable in a second mode with higher resolution than that of the first mode. In the first mode, the sample is observed while the sample stage is moved continuously, and in the second mode, the sample is observed by detecting a secondary electron using the detector while the sample stage is held stationary.