The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2008
Filed:
Aug. 22, 2005
Kye-weon Kim, Suwon-si, KR;
Chung-sam Jun, Suwon-si, KR;
Ki-suk Chung, Seoul, KR;
Sang-mun Chon, Yongin-si, KR;
Seong-jin Kim, Yongin-si, KR;
Byung-sug Lee, Suwon-si, KR;
Yu-sin Yang, Seoul, KR;
Kye-Weon Kim, Suwon-si, KR;
Chung-Sam Jun, Suwon-si, KR;
Ki-Suk Chung, Seoul, KR;
Sang-Mun Chon, Yongin-si, KR;
Seong-Jin Kim, Yongin-si, KR;
Byung-Sug Lee, Suwon-si, KR;
Yu-Sin Yang, Seoul, KR;
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Abstract
A method of inspecting an inspection pattern using a statistical inference function is disclosed. The inference function is generated in relation to optical reference signal data and reference pattern characteristic data for a plurality of reference patterns formed by a unit process of interest on reference substrates.