The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2008
Filed:
Jan. 21, 2005
Mitsugu Sato, Hitachinaka, JP;
Atsushi Takane, Mito, JP;
Shigeto Isakozawa, Hitachinaka, JP;
Takashi Iizumi, Hitachinaka, JP;
Tatsuya Maeda, Hitachinaka, JP;
Hiromi Inada, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Atsushi Takane, Mito, JP;
Shigeto Isakozawa, Hitachinaka, JP;
Takashi Iizumi, Hitachinaka, JP;
Tatsuya Maeda, Hitachinaka, JP;
Hiromi Inada, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A charged particle beam apparatus capable of automatically measuring an image magnification error of an apparatus and capable of automatically calibrating the image magnification in high precision is provided. To this end, while an image processing operation of either an auto-correlation function or an FFT transformation is employed with respect to a scanning image of a reference material having a periodic structure, the averaged pitch dimension of which is known, averaged periodic information owned by the scanning image is detected so as to measure an image magnification error of the apparatus. Also, the information as to the acquired image magnification error is fed back to an image magnification control means of the apparatus so as to automatically execute a calibration as to the image magnification in high precision.