The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2008
Filed:
Mar. 18, 2005
Sadanand V. Deshpande, Fishkill, NY (US);
Ying LI, Newburgh, NY (US);
Kevin E. Mello, Fishkill, NY (US);
Renee T. MO, Briarcliff Manor, NY (US);
Wesley C. Natzle, New Paltz, NY (US);
Kirk D. Peterson, Jericho, VT (US);
Robert J. Purtell, Mohegan Lake, NY (US);
Sadanand V. Deshpande, Fishkill, NY (US);
Ying Li, Newburgh, NY (US);
Kevin E. Mello, Fishkill, NY (US);
Renee T. Mo, Briarcliff Manor, NY (US);
Wesley C. Natzle, New Paltz, NY (US);
Kirk D. Peterson, Jericho, VT (US);
Robert J. Purtell, Mohegan Lake, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A cluster tool is provided for the implementing of a clustered and integrated surface pre-cleaning of the surface of semiconductor devices. More particularly, there is provided a cluster tool and a method of utilization thereof in an integrated semiconductor device surface pre-cleaning, which is directed towards a manufacturing aspect in which a chamber for performing a dry processing chemical oxide removal (COR) on the semiconductor device surface is clustered with other tools, such as a metal deposition tool for silicide or contact formation, including the provision of a vacuum transfer module in the cluster tool.