The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2007
Filed:
Aug. 31, 2004
James Siebert, San Jose, CA (US);
Lokesh Johri, San Jose, CA (US);
Dennis Mccarty, Fremont, CA (US);
Simon Voong, San Francisco, CA (US);
Madhumita Sengupta, Sunnyvale, CA (US);
Hui Wang, Newark, CA (US);
James Siebert, San Jose, CA (US);
Lokesh Johri, San Jose, CA (US);
Dennis McCarty, Fremont, CA (US);
Simon Voong, San Francisco, CA (US);
Madhumita Sengupta, Sunnyvale, CA (US);
Hui Wang, Newark, CA (US);
Credence Systems Corporation, Milpitas, CA (US);
Abstract
A charged particle beam system and scanning control method capable of imaging, and possibly editing, a device under test (DUT). The charged particle beam system contains a charged particle beam generation unit, such as a focused ion beam (FIB) column, which emits a charged particle beam onto the DUT. Also included is a scan controller arrangement implementing a finite state machine to control the application of the charged particle beam onto the DUT according to a plurality of scanning control parameters. The scanning control parameters may describe one or more scan regions that are rectangular in shape. Further, the parameters may describe one or more scan regions describing other shapes by way of a bit-map. Similarly, a method for controlling the scanning of a charged particle beam that involves obtaining a set of scanning control parameters, and then directing the charged particle beam as specified by the scanning control parameters by way of a finite state machine, is disclosed.