The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2007
Filed:
Dec. 20, 2004
Johannes Hubertus Josephina Moors, Helmond, NL;
Erik Leonardus Ham, Steenbergen, NL;
Gert-jan Heerens, Schoonhoven, NL;
Paulus Martinus Maria Liebregts, Veldhoven, NL;
Erik Roelof Loopstra, Heeze, NL;
Henri Gerard Cato Werij, Rotterdam, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Erik Leonardus Ham, Steenbergen, NL;
Gert-Jan Heerens, Schoonhoven, NL;
Paulus Martinus Maria Liebregts, Veldhoven, NL;
Erik Roelof Loopstra, Heeze, NL;
Henri Gerard Cato Werij, Rotterdam, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus arranged to transfer a pattern from a patterning device onto a substrate is disclosed. The apparatus includes an optics compartment that contains a patterned surface of the patterning device and an optical element, and a substrate compartment connected to the optics compartment by a connection that is arranged to pass a patterned beam of radiation from the optical element to the substrate. The apparatus also includes a first flush gas inlet arranged to supply a first flush gas into the connection, a second flush gas inlet adjacent to the patterned surface and arranged to supply a second flush gas into the optics compartment and to create a region adjacent the patterned surface in which the second flush gas flows in a direction with a component normal to and away from the patterned surface, and a gas pump arranged to pump the flush gases from the optics compartment.