The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2007
Filed:
Nov. 15, 2002
Marie Angelopoulos, Cortlandt Manor, NY (US);
Wu-song Huang, Poughkeepsie, NY (US);
Ranee Wai-ling Kwong, Wappingers Falls, NY (US);
David Robert Medeiros, Ossining, NY (US);
Wayne Martin Moreau, Wappingers Falls, NY (US);
Karen Elizabeth Petrillo, Mahopac, NY (US);
Herman Russell Wendt, San Jose, CA (US);
Christopher Karl Magg, Essex Junction, VT (US);
Marie Angelopoulos, Cortlandt Manor, NY (US);
Wu-Song Huang, Poughkeepsie, NY (US);
Ranee Wai-Ling Kwong, Wappingers Falls, NY (US);
David Robert Medeiros, Ossining, NY (US);
Wayne Martin Moreau, Wappingers Falls, NY (US);
Karen Elizabeth Petrillo, Mahopac, NY (US);
Herman Russell Wendt, San Jose, CA (US);
Christopher Karl Magg, Essex Junction, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
The present invention includes a packaged coated workpiece. The packaged coated workpiece has: (1) a workpiece coated with a resist film sensitive to optical radiation, particulates or chemical contaminants; (2) an inner barrier sealed to enclose the coated workpiece and optionally a first getter agent, to produce a sealed first enclosure; and (3) an outer barrier sealed to enclose the sealed first enclosure and optionally a second getter agent, provided that the packaged coated workpiece has at least one getter agent, to produce a packaged coated workpiece suitable for storage for a period of at least one week without substantial loss of sensitivity, resolution or performance. The present invention also includes a process for preparing a packaged coated workpiece and a method of increasing the storage time of a coated workpiece to at least one week without substantial loss of sensitivity, resolution or performance.