The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2006
Filed:
Oct. 26, 2005
Tsutomu Saito, Hitachinaka, JP;
Osamu Yamada, Hitachinaka, JP;
Eiichi Hazaki, Tsuchiura, JP;
Yasuhiko Nara, Hitachinaka, JP;
Hirofumi Sato, Naka, JP;
Yoshikazu Inada, Toride, JP;
Yoshinori Numata, Hitachinaka, JP;
Tsutomu Saito, Hitachinaka, JP;
Osamu Yamada, Hitachinaka, JP;
Eiichi Hazaki, Tsuchiura, JP;
Yasuhiko Nara, Hitachinaka, JP;
Hirofumi Sato, Naka, JP;
Yoshikazu Inada, Toride, JP;
Yoshinori Numata, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A defect inspecting apparatus in which a plurality of probes to measure electric characteristics of a sample including a fine wiring pattern are combined with a charged-particle beam unit includes graphic user interfaces (GUI) to simply control the plural probes. The apparatus includes a probe image processing unit to display the plural probes on a display; a selecting unit to select, from the probes displayed on the display, a probe to be operated; and a display unit to simultaneously display the probe selecting unit and information indicating that the selected probe is an operable probe, or the probe is in a non-selected state.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile