The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7129182 B1

PDF
Full Text
Expired
Date of Patent:
Oct. 31, 2006

Filed:

Nov. 06, 2003
Applicants:

Justin K. Brask, Portland, OR (US);

Mark L. Doczy, Beaverton, OR (US);

Jack Kavalieros, Portland, OR (US);

Uday Shah, Portland, OR (US);

Matthew V. Metz, Hillsboro, OR (US);

Robert S. Chau, Beaverton, OR (US);

Robert B. Turkot, Jr., Hillsboro, OR (US);

Inventors:

Justin K. Brask, Portland, OR (US);

Mark L. Doczy, Beaverton, OR (US);

Jack Kavalieros, Portland, OR (US);

Uday Shah, Portland, OR (US);

Matthew V. Metz, Hillsboro, OR (US);

Robert S. Chau, Beaverton, OR (US);

Robert B. Turkot, Jr., Hillsboro, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for etching a metal layer is described. That method comprises forming a metal layer on a substrate, then exposing part of the metal layer to a wet etch chemistry that comprises an active ingredient with a diameter that exceeds the thickness of the metal layer.


Find Patent Forward Citations

Brask, Justin. (2006). Method for etching a thin metal layer (U.S. Patent No. 7129182). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7129182

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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