The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2006
Filed:
Jul. 30, 2004
Kevin K. Chan, Staten Island, NY (US);
Huajie Chen, Danbury, CT (US);
Michael A. Gribelyuk, Stamford, CT (US);
Judson R. Holt, Wappingers Falls, NY (US);
Woo-hyeong Lee, Poughquag, NY (US);
Ryan M. Mitchell, Wake Forest, NC (US);
Renee T. MO, White Plains, NY (US);
Dan M. Mocuta, Lagrangeville, NY (US);
Werner A. Rausch, Stormville, NY (US);
Paul A. Ronsheim, Hopewell Junction, NY (US);
Henry K. Utomo, Poughkeepsie, NY (US);
Kevin K. Chan, Staten Island, NY (US);
Huajie Chen, Danbury, CT (US);
Michael A. Gribelyuk, Stamford, CT (US);
Judson R. Holt, Wappingers Falls, NY (US);
Woo-Hyeong Lee, Poughquag, NY (US);
Ryan M. Mitchell, Wake Forest, NC (US);
Renee T. Mo, White Plains, NY (US);
Dan M. Mocuta, Lagrangeville, NY (US);
Werner A. Rausch, Stormville, NY (US);
Paul A. Ronsheim, Hopewell Junction, NY (US);
Henry K. Utomo, Poughkeepsie, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
The present invention provides a method for retarding the diffusion of dopants from a first material layer (typically a semiconductor) into an overlayer or vice versa. In the method of the present invention, diffusion of dopants from the first semiconductor into the overlayer or vice versa is retarded by forming a monolayer comprising carbon and oxygen between the two layers. The monolayer is formed in the present invention utilizing a chemical pretreatment process in which a solution including iodine and an alcohol such as methanol is employed.