The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2006
Filed:
Sep. 27, 2002
Toyomi Nishi, Yokohama, JP;
Tetsuji Togawa, Fujisawa, JP;
Harumitsu Saito, Yokohama, JP;
Manabu Tsujimura, Yokohama, JP;
Hiromi Yajima, Yokohama, JP;
Kazuaki Himukai, Chigasaki, JP;
Shoichi Kodama, Tokyo, JP;
Yukio Imoto, Zama, JP;
Riichiro Aoki, Tokyo, JP;
Masako Watase, Yokohama, JP;
Atsushi Shigeta, Fujisawa, JP;
Shiro Mishima, Yokkaichi, JP;
Gisuke Kouno, Oita, JP;
Toyomi Nishi, Yokohama, JP;
Tetsuji Togawa, Fujisawa, JP;
Harumitsu Saito, Yokohama, JP;
Manabu Tsujimura, Yokohama, JP;
Hiromi Yajima, Yokohama, JP;
Kazuaki Himukai, Chigasaki, JP;
Shoichi Kodama, Tokyo, JP;
Yukio Imoto, Zama, JP;
Riichiro Aoki, Tokyo, JP;
Masako Watase, Yokohama, JP;
Atsushi Shigeta, Fujisawa, JP;
Shiro Mishima, Yokkaichi, JP;
Gisuke Kouno, Oita, JP;
Ebara Corporation, Tokyo, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A polishing apparatus for polishing a surface of a workpiece includes a housing unit, a partition wall partitioning an interior of the housing unit into a first chamber and a second chamber, a polishing section disposed in the first chamber and having a turntable with an abrasive cloth mounted on an upper surface thereof and a top ring positioned above the turntable for supporting the workpiece to be polished and pressing the workpiece against the abrasive cloth, and a cleaning section disposed in the second chamber and cleaning the workpiece which has been polished. The polishing apparatus further includes a transferring device for transferring the workpiece which has been polished from the polishing section to the cleaning section through an opening and an exhaust system for exhausting ambient air from each of the polishing section and cleaning section separately and independently.