The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2005
Filed:
Mar. 08, 2001
Takashi Hiroi, Yokohama, JP;
Masahiro Watanabe, Yokohama, JP;
Chie Shishido, Yokohama, JP;
Asahiro Kuni, Tokyo, JP;
Maki Tanaka, Yokohama, JP;
Hiroshi Miyai, Yokohama, JP;
Yasuhiko Nara, Hitachinaka, JP;
Mari Nozoe, Hino, JP;
Takashi Hiroi, Yokohama, JP;
Masahiro Watanabe, Yokohama, JP;
Chie Shishido, Yokohama, JP;
Asahiro Kuni, Tokyo, JP;
Maki Tanaka, Yokohama, JP;
Hiroshi Miyai, Yokohama, JP;
Yasuhiko Nara, Hitachinaka, JP;
Mari Nozoe, Hino, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
The present invention provides techniques, including a method and system, for inspecting for defects in a circuit pattern on a semi-conductor material. One specific embodiment provides a trial inspection threshold setup method, where the initial threshold is modified after a defect analysis of trial inspection stored data. The modified threshold is then used as the threshold in actual inspection.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile