The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2005
Filed:
Sep. 03, 2001
Hiro-o Nakagawa, Tokyo-to, JP;
Toshiaki Motonaga, Tokyo-to, JP;
Yoshinori Kinase, Tokyo-to, JP;
Satoshi Yusa, Tokyo-to, JP;
Shigeki Sumida, Tokyo-to, JP;
Toshifumi Yokoyama, Tokyo-to, JP;
Chiaki Hatsuta, Tokyo-to, JP;
Junji Fujikawa, Tokyo-to, JP;
Masashi Ohtsuki, Tokyo-to, JP;
Hiro-o Nakagawa, Tokyo-to, JP;
Toshiaki Motonaga, Tokyo-to, JP;
Yoshinori Kinase, Tokyo-to, JP;
Satoshi Yusa, Tokyo-to, JP;
Shigeki Sumida, Tokyo-to, JP;
Toshifumi Yokoyama, Tokyo-to, JP;
Chiaki Hatsuta, Tokyo-to, JP;
Junji Fujikawa, Tokyo-to, JP;
Masashi Ohtsuki, Tokyo-to, JP;
Dai Nippon Printing Co., Ltd., Tokyo-to, JP;
Abstract
Disclosed is a blank for a halftone phase shift photomask comprising a transparent substrate and a halftone phase shift layer formed thereon, the halftone phase shift layer being provided with a layer containing molybdenum silicide as its major component and either one or both of oxygen and nitrogen and being formed of a multilayer film with two or more layers, wherein the multilayer film contains a layer whose major component is either one of chromium and tantalum or a chromium tantalum alloy and the layer whose major component is either one of chromium and tantalum or a chromium tantalum alloy is laminated on the side closer to the transparent substrate than the layer containing molybdenum silicide as its major component and either one or both of oxygen and nitrogen.