The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2005
Filed:
Jan. 24, 2002
Toshikazu Tachikawa, Yokohama, JP;
Fumitake Kaneko, Kanagawa-ken, JP;
Naotaka Kubota, Kanagawa-ken, JP;
Miwa Miyairi, Kanagawa-ken, JP;
Takako Hirosaki, Kanagawa-ken, JP;
Koutaro Endo, Kanagawa-ken, JP;
Toshikazu Tachikawa, Yokohama, JP;
Fumitake Kaneko, Kanagawa-ken, JP;
Naotaka Kubota, Kanagawa-ken, JP;
Miwa Miyairi, Kanagawa-ken, JP;
Takako Hirosaki, Kanagawa-ken, JP;
Koutaro Endo, Kanagawa-ken, JP;
Tokyo Ohka Kogyo Co., Ltd., Kanagawa-ken, JP;
Abstract
Disclosed is a novel negative-working chemical-amplification photoresist composition comprising (A) an alkali-soluble resin, (B) an acid-generating agent and (C) a crosslinking agent, of which the component (B) is an onium salt compound selected from the group consisting of iodonium salt compounds and sulfonium salt compounds, having a specific fluoroalkyl sulfonate ion as the anionic moiety and the component (C) is a specific ethyleneurea compound substituted for at least one nitrogen atom by a hydroxymethyl or alkoxymethyl group. The photoresist composition is particularly suitable for the formation of a photoresist layer on a substrate surface provided with an undercoating of a water-insoluble organic anti-reflection film exhibiting excellent pattern resolution and orthogonal cross sectional profile of the patterned resist layer with a good temperature latitude in the post-exposure baking treatment for latent image formation.