The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2005
Filed:
Feb. 13, 2001
Masato Yoshida, Tsukuba, JP;
Toranosuke Ashizawa, Hitachinaka, JP;
Hiroki Terazaki, Tsukuba, JP;
Yasushi Kurata, Tsukuba, JP;
Jun Matsuzawa, Tsukuba, JP;
Kiyohito Tanno, Hitachi, JP;
Yuuto Ootuki, Hitachi, JP;
Masato Yoshida, Tsukuba, JP;
Toranosuke Ashizawa, Hitachinaka, JP;
Hiroki Terazaki, Tsukuba, JP;
Yasushi Kurata, Tsukuba, JP;
Jun Matsuzawa, Tsukuba, JP;
Kiyohito Tanno, Hitachi, JP;
Yuuto Ootuki, Hitachi, JP;
Hitachi Chemical Company, Ltd., Tokyo, JP;
Abstract
A cerium oxide abrasive slurry having, dispersed in a medium, cerium oxide particles whose primary particles have a median diameter of from 30 nm to 250 nm, a maximum particle diameter of 600 nm or smaller, and a specific surface area of from 7 to 45 m/g, and slurry particles have a median diameter of from 150 nm to 600 nm. The cerium oxide particles have structural parameter Y, representing an isotropic microstrain obtained by an X-ray Rietvelt method (with RIETAN-94), of from 0.01 to 0.70, and structural parameter X, representing a primary particle diameter obtained by an X-ray Rietvelt method (with RIETAN-94), of from 0.08 to 0.3. The cerium oxide abrasive slurry is made by a method of obtaining particles by firing at a temperature of from 600° C. to 900° C. and then pulverizing, then dispersing the resulting cerium oxide particles in a medium.