The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2005
Filed:
Apr. 08, 2002
Hubert Holderer, Koenigsbronn, DE;
Ulrich Weber, Ulm, DE;
Alexander Kohl, Aalen, DE;
Toralf Gruner, Koenigsbronn, DE;
Christoph Zaczek, Heubach, DE;
Jens Ullmann, Oberkochen, DE;
Martin Weiser, Sinsheim, DE;
Bernhard Gellrich, Aalen, DE;
Hartmut Muenker, Hilchenbach-Dahlbruch, DE;
Hubert Holderer, Koenigsbronn, DE;
Ulrich Weber, Ulm, DE;
Alexander Kohl, Aalen, DE;
Toralf Gruner, Koenigsbronn, DE;
Christoph Zaczek, Heubach, DE;
Jens Ullmann, Oberkochen, DE;
Martin Weiser, Sinsheim, DE;
Bernhard Gellrich, Aalen, DE;
Hartmut Muenker, Hilchenbach-Dahlbruch, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
A catadioptric objective comprises a plurality of lenses and at least two deflecting mirrors that have reflecting surfaces that are at a specific angle, in particular of 90°, to one another. The two deflecting mirrors are arranged with their reflecting surfaces on a common base member whose position in the objective can be set.