The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2003
Filed:
Jul. 20, 2001
Richard A. Conti, Mount Kisco, NY (US);
Prakash Chimanlal Dev, Plano, TX (US);
David M. Dobuzinsky, New Windsor, NY (US);
Daniel C. Edelstein, White Plains, NY (US);
Gill Y. Lee, Wappingers Falls, NY (US);
Kia-Seng Low, Hopewell Junction, NY (US);
Padraic C. Shafer, Beacon, NY (US);
Alexander Simpson, Wappingers Falls, NY (US);
Peter Wrschka, Wappingers Falls, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A structure and method for an insulator layer having carbon-graded layers above a substrate is disclosed, wherein the concentration of carbon increases in each successive carbon-graded layer above the substrate. The insulator comprises a low-k dielectric having a dielectric constant less than 3.3. The carbon-graded layer increases adhesion between the substrate and the insulator and between the insulator and the conductor layer. The structure may also include stabilization interfaces between the carbon-graded layers. More specifically, the carbon-graded layers include a first layer adjacent the substrate having a carbon content between about 5% and 20%, a second layer above the first layer having a carbon content between about 10% and 30%, and a third layer above the second layer having a carbon content between about 20% and 40%.