The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2002
Filed:
Aug. 17, 2001
Michael W. Halpin, Phoenix, AZ (US);
Mark R. Hawkins, Gilbert, AZ (US);
Derrick W. Foster, Scottsdale, AZ (US);
Robert M. Vyne, Gilbert, AZ (US);
John F. Wengert, Jacksonville, OR (US);
Cornelius A. van der Jeugd, Portland, OR (US);
Loren R. Jacobs, Mesa, AZ (US);
Frank B. M. Van Bilsen, Phoenix, AZ (US);
Matthew Goodman, Tempe, AZ (US);
Hartmann Glenn, Phoenix, AZ (US);
Jason M. Layton, Chandler, AZ (US);
ASM America, Inc., Phoenix, AZ (US);
Abstract
An apparatus for processing a substrate comprises a susceptor for supporting the substrate, an upper heat source spaced above the susceptor, a lower heat source spaced below the susceptor, and a controller. The controller provides power to the heat sources at a selected ratio between the sources. The controller is configured to vary the ratio during a high temperature processing cycle of a substrate to thereby vary the ratio of the heat provided by the heat sources during the cycle.