This inventor holds 13 USPTO granted patents. Top assignee: Asm America, Inc.. Active years: 2000-2010.
Location History:
- Phoenix, AZ (US) (2000 - 2002)
- Jacksonville, OR (US) (2000 - 2010)
Company Filing History:
Years Active: 2000-2010
Title: Innovations by John F. Wengert
Introduction
John F. Wengert is a notable inventor based in Jacksonville, OR (US). He has made significant contributions to the field of wafer support systems, holding a total of 13 patents. His work focuses on innovative designs that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Wengert's latest patents include a sophisticated wafer support system. This system comprises a susceptor with top and bottom sections, featuring gas flow passages. The design incorporates one or more spacers that project from a recess in the top section, supporting a wafer in a spaced relationship. A sweep gas is introduced to the bottom section, traveling through the gas flow passages to exit in a circular array of outlets beneath the wafer. This innovative approach prevents back-side contamination of the wafer by allowing the sweep gas to flow radially outward. The gas is delivered through a hollow drive shaft into a multi-armed susceptor support, which conducts the sweep gas to the gas passages. The arrangement of these passages heats the sweep gas before it is delivered underneath the wafer. Additionally, short purge channels may be included to ensure a continuous flow of protective purge gas around the spacers.
Career Highlights
Wengert is currently employed at Asm America, Inc., where he continues to develop cutting-edge technologies in the semiconductor industry. His expertise in wafer support systems has positioned him as a key player in advancing manufacturing processes.
Collaborations
Throughout his career, Wengert has collaborated with talented individuals such as Derrick W. Foster and Cornelius Alexander Van Der Jeugd. These partnerships have contributed to the successful development of innovative solutions in the field.
Conclusion
John F. Wengert's contributions to wafer support systems exemplify his commitment to innovation in the semiconductor industry. His patents reflect a deep understanding of the complexities involved in manufacturing processes, making him a valuable asset to his company and the field at large.