Company Filing History:
Years Active: 2000-2010
Title: Innovations of Jason M Layton
Introduction
Jason M Layton is a notable inventor based in Chandler, AZ (US). He has made significant contributions to the field of substrate processing, holding a total of 7 patents. His work focuses on enhancing the efficiency and effectiveness of wafer support systems.
Latest Patents
One of his latest patents is a wafer support system that comprises a susceptor with top and bottom sections and gas flow passages. This innovative system includes spacers that support a wafer in a spaced relationship with respect to the recess. A sweep gas is introduced to the bottom section of the susceptor, traveling through the gas flow passages to exit in a circular array of outlets underneath the wafer. This design prevents back-side contamination of the wafer by allowing the sweep gas to flow radially outward. The gas is delivered through a hollow drive shaft into a multi-armed susceptor support, which conducts the sweep gas to the gas passages in the susceptor. Additionally, short purge channels may be provided to ensure a continuous flow of protective purge gas around the spacers.
Another patent involves an apparatus for processing a substrate, which includes a susceptor for supporting the substrate, an upper heat source, a lower heat source, and a controller. The controller manages the power supplied to the heat sources at a selected ratio, varying this ratio during high-temperature processing cycles to optimize the heat provided.
Career Highlights
Jason M Layton is currently employed at Asm America, Inc., where he continues to innovate in the field of substrate processing. His work has significantly impacted the efficiency of wafer support systems, making him a valuable asset to his company.
Collaborations
Throughout his career, Jason has collaborated with notable colleagues, including Michael W Halpin and Mark R Hawkins. These collaborations have further enhanced his contributions to the field.
Conclusion
Jason M Layton's innovative work in wafer support systems and substrate processing has led to multiple patents and significant advancements in the industry. His contributions continue to shape the future of technology in this field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.