Company Filing History:
Years Active: 2001-2010
Title: Frank B M Van Bilsen: Innovator in Wafer Support Systems
Introduction
Frank B M Van Bilsen is a notable inventor based in Phoenix, AZ. He has made significant contributions to the field of semiconductor processing, holding a total of 7 patents. His work primarily focuses on improving wafer support systems and temperature control in processing chambers.
Latest Patents
One of his latest patents is a wafer support system that comprises a susceptor with top and bottom sections and gas flow passages. This innovative system includes spacers that support a wafer in a spaced relationship with respect to the recess. A sweep gas is introduced to the bottom section of the susceptor, traveling through the gas flow passages to exit in a circular array of outlets underneath the wafer. This design prevents back-side contamination of the wafer by allowing the sweep gas to flow radially outward. Additionally, the gas is delivered through a hollow drive shaft into a multi-armed susceptor support, which conducts the sweep gas to heat it prior to delivery underneath the wafer. Short purge channels are also included to ensure a continuous flow of protective purge gas around the spacers.
Another significant patent involves a system for controlling the temperature of a processing chamber. This CVD processing reactor utilizes a pyrometer for temperature ramping, calibrated between wafer processing using a thermocouple that senses temperature during a steady state portion of the operation.
Career Highlights
Frank B M Van Bilsen is currently employed at Asm America, Inc., where he continues to innovate in the field of semiconductor technology. His work has been instrumental in enhancing the efficiency and reliability of wafer processing systems.
Collaborations
Throughout his career, Frank has collaborated with notable colleagues, including Michael W Halpin and Mark R Hawkins. These collaborations have contributed to the advancement of technology in their field.
Conclusion
Frank B M Van Bilsen is a distinguished inventor whose work in wafer support systems and temperature control has made a significant impact in semiconductor processing. His innovative patents and collaborations reflect his commitment to advancing technology in this critical area.