Hartmann Glenn

Title: Hartmann Glenn: Innovator in Wafer Support Systems

Introduction

Hartmann Glenn is a notable inventor based in Phoenix, AZ (US). He has made significant contributions to the field of semiconductor processing, holding a total of 5 patents. His innovative designs focus on improving wafer support systems, which are crucial for the manufacturing of semiconductor devices.

Latest Patents

One of Hartmann Glenn's latest patents is a wafer support system that comprises a susceptor with top and bottom sections and gas flow passages. This system includes one or more spacers that support a wafer in a spaced relationship with respect to a recess in the susceptor. A sweep gas is introduced to the bottom section of the susceptor, traveling through the gas flow passages to exit in a circular array of outlets beneath the wafer. This design prevents back-side contamination of the wafer by allowing the sweep gas to flow radially outward. The gas is delivered through a hollow drive shaft into a multi-armed susceptor support, which conducts the sweep gas to the gas passages in the susceptor. Additionally, short purge channels may be included to ensure a continuous flow of protective purge gas around the spacers.

Another patent by Glenn involves an apparatus for processing a substrate, which features a susceptor for supporting the substrate, an upper heat source, a lower heat source, and a controller. The controller manages the power supplied to the heat sources at a selected ratio, which can be varied during high-temperature processing cycles to optimize the heating of the substrate.

Career Highlights

Hartmann Glenn has established himself as a key figure in the semiconductor industry through his innovative work at Asm America, Inc. His patents reflect a deep understanding of the complexities involved in wafer processing and the need for precision in semiconductor manufacturing.

Collaborations

Throughout his career, Glenn has collaborated with talented individuals such as Michael W Halpin and Mark R Hawkins. These partnerships have likely contributed to the advancement of his innovative ideas and the successful development of his patented technologies.

Conclusion

Hartmann Glenn's contributions to wafer support systems demonstrate his commitment to innovation in the semiconductor industry. His patents not only enhance the efficiency of wafer processing but also ensure the integrity of semiconductor devices. His work continues to influence the field and pave the way for future advancements.