The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2002
Filed:
Oct. 19, 1999
Ryo Nakagaki, Kawasaki, JP;
Yuji Takagi, Kamakura, JP;
Atsushi Shimoda, Hiratsuka, JP;
Kenji Obara, Yokohama, JP;
Yasuhiko Ozawa, Abiko, JP;
Hideka Bamba, Okazaki, JP;
Seiji Isogai, Hitachinaka, JP;
Kenji Watanabe, Oume, JP;
Chie Shishido, Yokohama, JP;
Toshiei Kurosaki, Hitachinaka, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
The invention is a scanning electron microscope including a switching control unit for controlling to switch at least scanning unit to switch a digital image signal of a low magnification based on a wide image taking field of view to and from a digital image signal of a high magnification based on a narrow image taking field of view from an A/D conversion unit and a beam spot diameter control unit for controlling to switch a spot diameter of electron beam on a surface of an object substrate in controlling to switch the signals by the switching control unit and a defect portion analyzing method using the scanning electron microscope.