The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2002
Filed:
Jun. 23, 2000
Tsuyoshi Sahoda, Sanbu-gun, JP;
Toshimitsu Uehigashi, Sanbu-gun, JP;
Yasushi Higuchi, Sanbu-gun, JP;
Kuniaki Nakajima, Susono, JP;
Tomoyasu Kondo, Susono, JP;
Nihon Shinku Gijutsu Kabushiki Kaisha, Kanagawa, JP;
Abstract
A sputtering device that efficiently guides sputtering particles ejected from a target to a film deposition subject and prolongs the interval at which a stick preventive member requires replacement. The sputtering device has a vacuum chamber in which a specified sputtering target is placed so as to face a substrate that is also placed in the vacuum chamber , and deposits a film on a surface of the substrate using sputtering particles ejected from the sputtering target ; and particle ejection sections constructed so as to slope at a specified angle of 30° to 60° with respect to the surface of the substrate , and respectively facing each other in the shape of a funnel are provided on the sputtering target . Lines of magnetic force run from an N pole of a magnet arranged at a rear surface of the target to an S pole of a magnet arranged around the target