The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2001
Filed:
Apr. 19, 2000
James F. Cameron, Cambridge, MA (US);
James Michael Mori, Boston, MA (US);
George W. Orsula, Harvard, MA (US);
James W. Thackeray, Braintree, MA (US);
Wu-Song Huang, Poughkeepsie, NY (US);
Ronald A. DellaGuardia, Poughkeepsie, NY (US);
Kuang-Jung Chen, Poughkeepsie, NY (US);
Hiroshi Ito, San Jose, CA (US);
Wayne M. Moreau, Wappingers Falls, NY (US);
Other;
Abstract
The invention provides new photoresist compositions that contain a resin binder and a blend of photoacid generators. Photoacid generator blends of the invention produce photoacids that differ in acid strength and/or size. A specific composition comprises a terpolymer having units of hydroxystyrene, styrene and t-butyl acrylate with the photoacid generators di-(4-tbutylphenyl)iodonium camphorsulfonate and di-(4-t-butylphenyl)iodonium o-trifluoromethylbenzene sulfonate.