The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 1997
Filed:
Mar. 19, 1996
Leping Li, Poughkeepsie, NY (US);
Steven George Barbee, Dover Plains, NY (US);
Gary Richard Doyle, Jonesville, VT (US);
Arnold Halperin, Cortlandt Manor, NY (US);
Kevin L Holland, Newburgh, NY (US);
Francis Walter Kazak, Essex Junction, VT (US);
Robert B Lipori, Stamford, CT (US);
Anne Elizabeth McGuire, Colchester, VT (US);
Rock Nadeau, Essex Junction, VT (US);
William Joseph Surovic, Carmel, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Rotary signal coupling in in-situ monitoring of a chemical-mechanical polishing process. A sensor fixed to a rotatable wafer carrier for creating a signal responsive to the chemical mechanical polishing process is coupled to a bottom half of a rotary transformer fixed to a rotating portion of the polisher. A top half of the rotary transformer, coupled to the bottom half of the rotary transformer, is fixed to a stationary portion of the polisher. The signal from the sensor is thus coupled through the rotary transformer to a process monitor.