Anne Elizabeth McGuire

Title: Innovations by Anne Elizabeth McGuire in Semiconductor Processing

Introduction

Anne Elizabeth McGuire, an accomplished inventor based in Colchester, Vermont, has made significant contributions to the field of semiconductor processing. With a total of three patents to her name, she actively works to advance technology through her innovations.

Latest Patents

Two of Anne's notable patents focus on a dishing and erosion monitor structure specifically designed for damascene metal processing. According to the preferred embodiment, these monitors facilitate the accurate optimization of planarization processes commonly utilized in semiconductor manufacturing. The dishing monitor includes at least two sets of monitor structures embedded within a semiconductor substrate. These sets comprise multiple monitor structures interconnected by a series of connective conductors. Additionally, the erosion monitor consists of elongated conductors embedded in the semiconductor substrate, featuring varying widths to enhance monitoring effectiveness.

Career Highlights

Anne works with the renowned International Business Machines Corporation (IBM), where she continues to push the boundaries of technology. Her expertise in semiconductor processes positions her as a leading figure in her field.

Collaborations

Throughout her career, Anne has collaborated with notable co-workers such as Rock Nadeau and Faye D. Baker. These partnerships have allowed her to further refine her innovations and contribute valuable insights into the development of advanced semiconductor processing techniques.

Conclusion

Anne Elizabeth McGuire's innovative work in semiconductor processing, particularly through her patents on dishing and erosion monitors, showcases her expertise as an inventor. Her contributions not only enhance technology at IBM but also pave the way for future advancements in the industry.