The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 1997
Filed:
Sep. 20, 1994
Katsuya Okumura, Poughkeepsie, JP;
Riichirou Aoki, Tokyo, JP;
Hiromi Yajima, Kanagawa--ken, JP;
Masako Kodera, Kanagawa-ken, JP;
Shirou Mishima, Kanagawa-ken, JP;
Atsushi Shigeta, Kanagawa-ken, JP;
Masayoshi Hirose, Tokyo, JP;
Norio Kimura, Tokyo, JP;
Seiji Ishikawa, Tokyo, JP;
Kabushiki Kaisya Toshiba, Kanagawa-ken, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A polishing apparatus is a cluster type of apparatus having a plurality of units which perform various operations. The polishing apparatus includes a universal transfer robot having at least one arm for transferring a workpiece, a plurality of units disposed around the universal transfer robot and including a loading unit for receiving the workpiece to be polished, at least one polishing unit for polishing the workpiece, at least one washing unit for washing the workpiece which has been polished and an unloading unit for receiving the cleaned workpiece. Discrete mechanisms respectively transfer a clean workpiece and a dirty workpiece amongst the units.