The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2026
Filed:
Jun. 28, 2022
Jusung Engineering Co., Ltd., Gwangju-Si, KR;
Byung Gwan Lim, Gwangju-Si, KR;
Sang Kyo Kwon, Gwangju-Si, KR;
Yong Hyun Kim, Gwangju-Si, KR;
Jin Hyun Kim, Gwangju-Si, KR;
Hong Eun Kim, Gwangju-Si, KR;
Il Houng Park, Gwangju-Si, KR;
Chang Kyun Park, Gwangju-Si, KR;
In Woo Back, Gwangju-Si, KR;
Won Ju Oh, Gwangju-Si, KR;
Dong Hwan Lee, Gwangju-Si, KR;
Yong Hyun Lee, Gwangju-Si, KR;
Jun Seok Lee, Gwangju-Si, KR;
Seung Hyun Cho, Gwangju-Si, KR;
Jeong Heo, Gwangju-Si, KR;
Chul Joo Hwang, Gwangju-Si, KR;
JUSUNG ENGINEERING CO., LTD., , KR;
Abstract
Disclosed are a raw material supply method including vaporizing a raw material in a canister, discharging the vaporized raw material, measuring an inner temperature of the canister, calculating a calculated temperature by using the inner temperature, and compensating a variation of the inner temperature by heating a heating unit disposed on the canister at the calculated temperature and a raw material supply apparatus applied to the method for supplying the raw material. The raw material supply method and apparatus may stably supply the vaporized raw material to a process space.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile