Company Filing History:
Years Active: 2024
Title: Sang Kyo Kwon: Innovator in Substrate Processing Technology
Introduction
Sang Kyo Kwon is a notable inventor based in Gwangju-si, South Korea. He has made significant contributions to the field of substrate processing technology. His innovative work focuses on enhancing the safety and efficiency of substrate processing apparatuses.
Latest Patents
Sang Kyo Kwon holds a patent for a substrate processing apparatus and an interlock method thereof. This invention is designed to generate an interlock signal when the temperature of each upper or lower electrode in a process chamber exceeds a user-defined range. The system effectively cuts off the application of RF power to the substrate processing apparatus in such scenarios. This technology is crucial for protecting equipment from damage caused by RF power and ensuring the uniformity of thin films deposited on substrates.
Career Highlights
Sang Kyo Kwon is associated with Jusung Engineering Co., Ltd., where he applies his expertise in substrate processing technology. His work has been instrumental in advancing the capabilities of the company's products and services.
Collaborations
Sang Kyo Kwon collaborates with Jae Wan Lee, contributing to the development of innovative solutions in their field.
Conclusion
Sang Kyo Kwon's contributions to substrate processing technology exemplify the importance of innovation in enhancing equipment safety and performance. His patent reflects a commitment to advancing technology in this critical area.