The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2026
Filed:
Apr. 10, 2023
Tokyo Electron Limited, Tokyo, JP;
Sergey Voronin, Albany, NY (US);
Francisco Machuca, Fremont, CA (US);
Blaze Messer, Albany, NY (US);
Yan Chen, Fremont, CA (US);
Ying Zhu, Fremont, CA (US);
Mihail Mihaylov, Fremont, CA (US);
Joel Ng, Fremont, CA (US);
Ashawaraya Shalini, Fremont, CA (US);
Da Song, Albany, NY (US);
Akiteru Ko, Albany, NY (US);
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A processing system that includes: a processing chamber configured to hold a substrate to be processed; a first vacuum pump; a second vacuum pump disposed downstream from the first vacuum pump; an exhaust gas line connecting the process chamber and the first vacuum pump, and the first vacuum pump and the second vacuum pump; a plasma power supply including a first RF power source configured to generate a plasma from a portion of an exhaust gas between the first and second vacuum pumps; and an optical emission spectroscopy (OES) measurement assembly including an OES detector configured to measure OES signals from the plasma.