The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2026
Filed:
Jun. 30, 2022
Intel Corporation, Santa Clara, CA (US);
Abhishek Anil Sharma, Portland, OR (US);
Sagar Suthram, Portland, OR (US);
Pushkar Ranade, San Jose, CA (US);
Anand S. Murthy, Portland, OR (US);
Tahir Ghani, Portland, OR (US);
Rishabh Mehandru, Portland, OR (US);
Cory Weber, Hillsboro, OR (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
Structures having airgaps for backside signal routing or power delivery are described. In an example, an integrated circuit structure includes a front-side structure including a device layer having a plurality of nanowire-based transistors, and a plurality of metallization layers above the nanowire-based transistors of the device layer. A backside structure is below the nanowire-based transistors of the device layer. The backside structure includes a first conductive line laterally spaced apart from a second conductive line by an air gap.