The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 24, 2026

Filed:

Sep. 08, 2022
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Tao Chu, Portland, OR (US);

Feng Zhang, Hillsboro, OR (US);

Minwoo Jang, Portland, OR (US);

Yanbin Luo, Portland, OR (US);

Chia-Ching Lin, Portland, OR (US);

Ting-Hsiang Hung, Beaverton, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 30/69 (2025.01); H10B 10/00 (2023.01); H10D 30/62 (2025.01);
U.S. Cl.
CPC ...
H10D 30/795 (2025.01); H10B 10/12 (2023.02); H10D 30/62 (2025.01); H10D 30/794 (2025.01);
Abstract

Fin trim plug structures with metal for imparting channel stress are described. In an example, an integrated circuit structure includes a fin including silicon, the fin having a top and sidewalls, wherein the top has a longest dimension along a direction. A first isolation structure is over a first end of the fin. A gate structure including a gate electrode is over the top of and laterally adjacent to the sidewalls of a region of the fin. The gate structure is spaced apart from the first isolation structure along the direction. A second isolation structure is over a second end of the fin, the second end opposite the first end, the second isolation structure spaced apart from the gate structure along the direction. The first isolation structure and the second isolation structure both include a dielectric material laterally surrounding an isolated metal structure.


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