The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 20, 2026

Filed:

Oct. 22, 2020
Applicant:

Cmc Materials, Inc., Aurora, IL (US);

Inventors:

Steven Kraft, Elgin, IL (US);

Fernando Hung Low, Naperville, IL (US);

Sudeep Pallikkara Kuttiatoor, Naperville, IL (US);

Sarah Brosnan, St. Charles, IL (US);

Brian Reiss, Woodridge, IL (US);

Sajo Naik, Naperville, IL (US);

Assignee:

CMC Materials LLC, Aurora, IL (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09G 1/02 (2006.01); B24B 37/04 (2012.01); C09K 3/14 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); B24B 37/044 (2013.01); C09K 3/1409 (2013.01);
Abstract

A chemical mechanical polishing composition for polishing a substrate having a silicon oxygen material includes a liquid carrier, cubiform ceria abrasive particles dispersed in the liquid carrier, and an organic diacid.


Find Patent Forward Citations

Kraft, Steven. (2026). Composition and method for silicon oxide and carbon doped silicon oxide cmp (U.S. Patent No. 12528973). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12528973

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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