The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2025
Filed:
Mar. 30, 2022
Kla Corporation, Milpitas, CA (US);
Yuri Paskover, Milpitas, CA (US);
Itay Gdor, Tel-Aviv, IL;
Yuval Lubashevsky, Haifa, IL;
Vladimir Levinski, Nazareth Ilit, IL;
Alexander Volfman, Milpitas, CA (US);
Yoram Uziel, Milpitas, CA (US);
Yevgeniy Men, Milpitas, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
A system includes an illumination source configured to generate an illumination beam, and a collection sub-system that includes an objective lens, one or more detectors located at a collection pupil plane, a light modulator, and a controller. The light modulator is configured to direct one or more selected portions of measurement light to the one or more detectors. The controller includes one or more processors configured to execute program instructions causing the one or more processors to execute a metrology recipe by: receiving detection signals from the one or more detectors, wherein the detection signals are associated with the one or more selected portions of the measurement light directed to the one or more detectors; and generating an overlay measurement associated with at least two layers of a sample based on the detection signals.