The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2025
Filed:
Apr. 25, 2024
Kla Corporation, Milpitas, CA (US);
Rajkumar Theagarajan, Milpitas, CA (US);
Yujie Dong, Newark, CA (US);
Jing Zhang, Santa Clara, CA (US);
Brian Duffy, San Jose, CA (US);
Atiqur Rahman Chowdhury, Milpitas, CA (US);
Kris Bhaskar, San Jose, CA (US);
Yang Li, San Jose, CA (US);
Graham Jensen, Milpitas, CA (US);
KLA CORPORATION, Milpitas, CA (US);
Abstract
Methods and systems for determining information for a specimen are provided. One system includes a computer subsystem and one or more components executed by the computer subsystem that include a setup deep learning (DL) model configured for separately performing defect detection for a specimen based on output generated for the specimen by each of two or more modes of an inspection system, respectively, and separately re-performing defect detection for the specimen based on masked output generated for each of the modes, respectively. The computer subsystem determines a difference between results of separately performing and separately re-performing the defect detections for each of the modes, respectively, and identifies a subset of the modes for which the difference is larger than other modes as candidate mode(s) for inspection of the specimen.