The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 16, 2025

Filed:

Jun. 29, 2022
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Karthik Jambunathan, Portland, OR (US);

Biswajeet Guha, Hillsboro, OR (US);

Anand S. Murthy, Portland, OR (US);

Tahir Ghani, Portland, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 30/43 (2025.01); H10D 30/01 (2025.01); H10D 30/62 (2025.01); H10D 30/67 (2025.01); H10D 62/10 (2025.01); H10D 64/01 (2025.01); H10D 64/23 (2025.01); H01L 21/02 (2006.01); H10D 62/80 (2025.01); H10D 62/83 (2025.01); H10D 62/85 (2025.01); H10D 99/00 (2025.01);
U.S. Cl.
CPC ...
H10D 64/017 (2025.01); H10D 30/014 (2025.01); H10D 30/43 (2025.01); H10D 30/6219 (2025.01); H10D 30/6713 (2025.01); H10D 30/6735 (2025.01); H10D 30/6757 (2025.01); H10D 62/121 (2025.01); H10D 64/018 (2025.01); H10D 64/251 (2025.01); H10D 64/258 (2025.01); H01L 21/02532 (2013.01); H01L 21/02535 (2013.01); H01L 21/02543 (2013.01); H01L 21/02546 (2013.01); H01L 21/02565 (2013.01); H01L 21/02603 (2013.01); H10D 30/021 (2025.01); H10D 30/031 (2025.01); H10D 30/6741 (2025.01); H10D 30/6743 (2025.01); H10D 30/675 (2025.01); H10D 30/6755 (2025.01); H10D 62/80 (2025.01); H10D 62/83 (2025.01); H10D 62/85 (2025.01); H10D 99/00 (2025.01);
Abstract

Embodiments herein describe techniques, systems, and method for a semiconductor device. A nanowire transistor may include a channel region including a nanowire above a substrate, a source electrode coupled to a first end of the nanowire through a first etch stop layer, and a drain electrode coupled to a second end of the nanowire through a second etch stop layer. A gate electrode may be above the substrate to control conductivity in at least a portion of the channel region. A first spacer may be above the substrate between the gate electrode and the source electrode, and a second spacer may be above the substrate between the gate electrode and the drain electrode. A gate dielectric layer may be between the channel region and the gate electrode. Other embodiments may be described and/or claimed.


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