The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2025
Filed:
Feb. 06, 2024
Auros Technology, Inc., Hwaseong-si, KR;
Sol-Lee Hwang, Hwaseong-si, KR;
Hee-Chul Lim, Hwaseong-si, KR;
Dong-Won Jung, Hwaseong-si, KR;
Min-Ho Lee, Hwaseong-si, KR;
Hyun-Kyoo Shon, Hwaseong-si, KR;
AUROS TECHNOLOGY, INC., Hwaseong-si, KR;
Abstract
An overlay measurement device for measuring an error between a first overlay mark and a second overlay mark respectively formed on different layers of a wafer, includes: a light source; an aperture that changes a beam from the light source to be suitable for photographing the first overlay mark or the second overlay mark; a detector for obtaining an image of the first overlay mark or an image of the second overlay mark; a transmission and receipt part; and a processor connecting to the transmission and receipt part electrically.